論文

• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system, J. Vac. Sci. Technol. A, J. Vac. Sci. Technol. A, Vol. A27, No. 3, pp. 465-470, Mar. 2009.
• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization, IEEE Trans. on Semicon. Manufacturing, IEEE, Vol. 21, No. 4, pp. 668-675, Nov. 2008.
• Tadahiro Ohmi, Hiraku ISHIKAWA, Toshihisa NOZAWA, Takaaki MATSUOKA, Akinobu TERAMOTO, Masaki HIRAYAMA, Takashi ITO, Tadahiro OHMI. Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization, Japanese Journal of Applied Physics, The Japan Society of Applied Physics, Vol. 47, No. 4, pp. 2531–2534, Apr. 2008.

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