@article{CTT100615405,
  author = {Xun Gu and Takenao Nemoto and Akinobu Teramoto and Takashi Ito and Tadahiro Ohmi},
  title = {Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon},
  journal = {J. Electrochem. Soc.},
  year = 2009,
}

@article{CTT100615409,
  author = {Katsumasa Suzuki and Yoshio Ishihara and Kaoru Sakoda and Yasuyuki Shirai and Akinobu Teramoto and Masaki Hirayama and Tadahiro Ohmi and Takayuki Watanabe and Takashi Ito},
  title = {Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system},
  journal = {J. Vac. Sci. Technol. A},
  year = 2009,
}

@article{CTT100615370,
  author = {Katsumasa Suzuki and Yoshio Ishihara and Kaoru Sakoda and Yasuyuki Shirai and Akinobu  Teramoto and Masaki Hirayama and Tadahiro Ohmi and Takayuki Watanabe and Takashi Ito},
  title = {High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization},
  journal = {IEEE Trans. on Semicon. Manufacturing},
  year = 2008,
}

@article{CTT100615344,
  author = {Tadahiro Ohmi and Hiraku ISHIKAWA and Toshihisa NOZAWA and Takaaki MATSUOKA and Akinobu TERAMOTO and Masaki HIRAYAMA and Takashi ITO and Tadahiro OHMI},
  title = {Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization},
  journal = {Japanese Journal of Applied Physics},
  year = 2008,
}

@article{CTT100615380,
  author = {Takenao Nemoto and Hiroshi Imai and Akinobu Teramoto and Takashi Ito and Shigetoshi Sugawa and Tadahiro Ohmi},
  title = {Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections},
  journal = {Journal of The Electrochemical Society},
  year = 2008,
}

@inproceedings{CTT100615492,
  author = {S.Morishita and T.Goto and I.Akutsu and K.Ohyama and T.Ito and T.Ohmi},
  title = {High-Speed Gas Replacement in Plasma Process Chamber due to Precise Down-Flow of Gas Using a Upper Shower Plate},
  booktitle = {Dry Process International Symposium （DPS2008）},
  year = 2008,
}

@inproceedings{CTT100615489,
  author = {Sadaharu Morishita and Tetsuya Goto and Takashi Ito and Tadahiro Ohmi},
  title = {Study on Gas Replacement Time in Plasma Process Chamber for Realizing Ideal Down Flow of Gas without Disturbance},
  booktitle = {Int. Symp. on Semicon. Manufacturing 2008 (ISSM2008)},
  year = 2008,
}