@article{CTT100615363,
  author = {杉野林志 and Unsoon Kim and Kyunghoon Min and Ning Chen and Huaqiang Wu and Chungho Lee and Fred Cheung and Hiroyuki Kinoshita and 上西雅彦 and 加藤寿 and 多田新吾 and 伊藤隆司},
  title = {塩素ガスエッチングを用いた微細MOS Elevated Source/Drain プロセス},
  journal = {電子情報通信学会論文誌C},
  year = 2008,
}