論文

• Xun Gu, Takenao Nemoto, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi. Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon, J. Electrochem. Soc., J. Electrochem. Soc., Vol. 156, No. 6, pp. H409-H415, June 2009.
• Takenao Nemoto, Hiroshi Imai, Akinobu Teramoto, Takashi Ito, Shigetoshi Sugawa, Tadahiro Ohmi. Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections, Journal of The Electrochemical Society, The Electrochemical Society, Vol. 155, No. 5, pp. H323-H328, Mar. 2008.

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