@article{CTT100615380,
  author = {Takenao Nemoto and Hiroshi Imai and Akinobu Teramoto and Takashi Ito and Shigetoshi Sugawa and Tadahiro Ohmi},
  title = {Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections},
  journal = {Journal of The Electrochemical Society},
  year = 2008,
}