@article{CTT100615405,
  author = {Xun Gu and Takenao Nemoto and Akinobu Teramoto and Takashi Ito and Tadahiro Ohmi},
  title = {Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon},
  journal = {J. Electrochem. Soc.},
  year = 2009,
}