@inproceedings{CTT100615492,
  author = {S.Morishita and T.Goto and I.Akutsu and K.Ohyama and T.Ito and T.Ohmi},
  title = {High-Speed Gas Replacement in Plasma Process Chamber due to Precise Down-Flow of Gas Using a Upper Shower Plate},
  booktitle = {Dry Process International Symposium （DPS2008）},
  year = 2008,
}