@article{CTT100625369,
  author = {Rinji Sugino and Yoshiko Okui and Mayumi Shigeno and Satoshi Okuno and Kanetake Takasaki and Takashi Ito},
  title = {Dry Cleaning for Fe Contaminants on Si and SiO2   Surfaces with Silicon Chlorides},
  journal = {J. Electrochem. Soc.},
  year = 1997,
}