@article{CTT100634515,
  author = {Ichiro Kato and Takashi Ito and Shnichi Inoue and Tetsuo Nakamura and Hajime Ishikawa},
  title = {Ammonia Annealed SiO2 Films for Thin Gate Insulators},
  journal = {Japanese Journal of Applied Physics. Supplement},
  year = 1982,
}