@article{CTT100634556,
  author = {Yasuhiro Sato and Rinshi Sugino and Takashi Ito},
  title = {Photoexcited Processes for Semiconductor Dry Cleaning and Dry Etching},
  journal = {FUJITSU SCIENTIFIC & TECHNICAL JOURNAL},
  year = 1991,
}

@inproceedings{CTT100634710,
  author = {Takashi Ito and Rinshi Sugino and Yasuhiro Sato and Masaki Okuno and Akira Osawa and Takayuki Aoyama and Tatsuya Yamazaki and Yoshihiro Arimoto},
  title = {Photo-Excited Cleaning of Silicon with Chlorine and Fluorine},
  booktitle = {MRS Symp. Proceeding},
  year = 1992,
}