論文

• Norio Miyata, Tatsuya Yamazaki, Yoshihiro Arimoto, Takashi Ito. Intermittent Ultraviolet lrradiation for Silicon Selective Epitaxial Growth, Applied Phisics Letters, American Institute of Physics, Vol. 62, No. 8, pp. 588-590, Dec. 1992.
• Tatsuya Yamazaki, Norio Miyata, Takayuki Aoyama, Takashi Ito. Investigation of Thermal Removal of Native Oxide from Si (100) Surfaces in Hydrogen for Low-Temperature Si CVD Epitaxy, Journal of The Electrochemical Society, The Electrochemical Society, Vol. 139, No. 4, pp. 1175-1180, Apr. 1990.

国際会議発表 (査読有り)

• Kazuo Takase, Toshio Igarashi, Norio Miyata, Koji Moriki, Rinshi Sugino, Yasuo Nara, Takashi Ito, Minoru Fujisawa, Takeo Hattori. Native Oxide Formed During Wet Chemical Treatments, Ext. Abs. of 2lst Conf. on SSDM, Ext. Abs. of 2lst Conf. on SSDM, pp. 393-394, 1989.

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