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戸田陽子 研究業績一覧 (1件)
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論文
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Takayuki Aoyama,
Kunihiro Suzuki,
Hiroko Tashiro,
Yoko Toda,
Tatsuya Yamazaki,
Kanetake Takasaki,
Takashi Ito.
Effect of Fluorine on Boron Diffusion in Thin Silicon Dioxides and Oxynitride,
Journal of Applied Physics,
American Institute of Physics,
Vol. 77,
No. 1,
pp. 417-419,
Sept. 1994.
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