@article{CTT100634581,
  author = {Yoji Saito and Hideo Imai and Yoshihiro Sugita and Takashi Ito},
  title = {Effects of Vacuum-Ultraviolet-Light-Induced Surface Reaction on Selective and Anisotropic Etching of Silicon Dioxide Using Anhydrous Hydrogen Fluoride Gas},
  journal = {Japanese Journal of Applied Physics},
  year = 1995,
}