@inproceedings{CTT100634612,
  author = {Tetsu Fukano and Takashi Ito and Tokushige Hisatsugu and Hajime Ishikawa},
  title = {Ultra Sharp Trench Capacitors Formed by Peripheral Etching},
  booktitle = {Ext. Abst. of 16th (1984 International Conf. on SSDM},
  year = 1984,
}