@inproceedings{CTT100634712,
  author = {Fumio Sugimoto and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito},
  title = {A pH-  Controlled Chemical Mechanical Polishing Method for Ultra-Thin Bonded SOI  Wafer},
  booktitle = {Dig. of Tech. Papers, Symp. on VLSI Tech.},
  year = 1993,
}