@inproceedings{CTT100634661, author = {Tetsuo Eshita and Kunihiro Suzuki and Toru Hara and Fumio Mieno and Yuji Furumura and Mamoru Maeda and Toshihiro Sugii and Takashi Ito}, title = {Low-Temperature Heteroepitaxy of β- SiC on Si(111) Substrates}, booktitle = {Proc. MRS Symp.}, year = 1988, }