@inproceedings{CTT100654576,
  author = {K.Tuokedaerhan and 金田翼 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI},
  title = {Impact of annealing ambient for La2O3/Si capacitor},
  booktitle = {},
  year = 2013,
}