@inproceedings{CTT100654673,
  author = {Hiroshi Nohira and 小松新 and 山下晃司 and Kuniyuki KAKUSHIMA and HIROSHI IWAI and Y. Hioshi and K. Sawano and Y. Shiraki},
  title = {XPS Study on Chemical Bonding States of high-k/high-μ Gate Stacks for Advanced CMOS},
  booktitle = {ECS Transactions},
  year = 2011,
}