@article{CTT100672693,
  author = {Toru Numaguchi and Toru Umada and Syuichi Tsuzuki},
  title = {Defect reduction using POU filtration in a new coater/developer},
  journal = {Solid. State Technology},
  year = 2009,
}

@inproceedings{CTT100673302,
  author = {Toru Numaguchi and Toru Umada and Takehito Mizuno and Syuichi Tsuzuki},
  title = {New filter rating method in practice for sub 30nm lithography process filter},
  booktitle = {Proceedings of SPIE, The international Society for Optical Engineering},
  year = 2010,
}

@inproceedings{CTT100673305,
  author = {Toru Numaguchi and Toru Umada and Fumitake Watanabe and Syuichi Tsuzuki},
  title = {Filtration condition study for enhanced microbridge reduction},
  booktitle = {Proceedings of SPIE, The international Society for Optical Engineering},
  year = 2009,
}

@inproceedings{CTT100673308,
  author = {Toru Numaguchi and Toru Umada and Syuichi Tsuzuki},
  title = {The first on-site evaluation of a new filter optimized for TARC and developer},
  booktitle = {Proceedings of SPIE, The international Society of Optical Engineering},
  year = 2008,
}

@inproceedings{CTT100673314,
  author = {Toru Numaguchi and Toru Umada and Syuichi Tsuzuki},
  title = {Start up optimization for point of use filter in lithography process},
  booktitle = {IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings},
  year = 2007,
}