@inproceedings{CTT100673302,
  author = {Toru Numaguchi and Toru Umada and Takehito Mizuno and Syuichi Tsuzuki},
  title = {New filter rating method in practice for sub 30nm lithography process filter},
  booktitle = {Proceedings of SPIE, The international Society for Optical Engineering},
  year = 2010,
}

@inproceedings{CTT100673311,
  author = {Toru Numaguchi and Takehito Mizuno and Akihisa Namiki and Syuichi Tsuzuki},
  title = {A novel filter rating method for less than 30nm particles},
  booktitle = {IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings},
  year = 2008,
}

@inproceedings{CTT100673313,
  author = {Toru Numaguchi and Masayuki Nose and Takehito Mizuno and Syuichi Tsuzuki},
  title = {Particle removal performance of 20nm rated filters for advanced wet chemical cleaning},
  booktitle = {IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings},
  year = 2007,
}