@inproceedings{CTT100673313,
  author = {Toru Numaguchi and Masayuki Nose and Takehito Mizuno and Syuichi Tsuzuki},
  title = {Particle removal performance of 20nm rated filters for advanced wet chemical cleaning},
  booktitle = {IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings},
  year = 2007,
}