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研究業績一覧 (1件)
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論文
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M Sumisaka,
K Yamazaki,
Satoshi Fujii,
G Tang,
T Han,
Y Suzuki,
S Otomo,
T Omori,
Ken-Ya Hashimoto.
Sputter Deposition of ScAlN Thin Films Using a Sc-Al Alloy Target,
Japanese Journal of Applied Physics,
vol. 54,
pp. 07HD06-1〜04,
July 2015.
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