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研究業績一覧 (1件)
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論文
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Tetsuya Miyazawa,
Yu Kano,
Yasuo Nakayama,
KENICHI OZAWA,
Toshiharu Iga,
Misao Yamanaka,
Ayako Hashimoto,
Takashi Kikuchi,
Kazuhiko Mase.
Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen,
Journal of Vacuum Science & Technology A,
AIP Publishing,
Vol. 37,
No. 2,
Jan. 2019.
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