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古川将人 研究業績一覧 (2件)
論文
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Takehiko Kikuchi,
Liu Bai,
Takuya Mitarai,
Hideki Yagi,
Masato Furukawa,
Tomohiro Amemiya,
Nobuhiko Nishiyama,
Shigehisa Arai.
Enhanced bonding strength of InP/Si chip-on-wafer by plasma-activated bonding using stress-controlled interlayer,
Japanese Journal of Applied Physics,
Vol. 59,
p. SBBD02,
May 2020.
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Takehiko Kikuchi,
Liu Bai,
Takuya Mitarai,
Hideki Yagi,
Masato Furukawa,
Tomohiro Amemiya,
Nobuhiko Nishiyama,
Shigehisa Arai.
Enhanced bonding strength of InP/Si chip-on-wafer by plasma-activated bonding using stress-controlled interlayer,
Japanese Journal of Applied Physics,
Volume 59,
Number SB,
pp. SBBD02-1,
Dec. 2019.
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