@article{CTT100838426, author = {Yoshihiro Aiura and KENICHI OZAWA and Kazuhiko Mase and Makoto Minohara and Satoshi Suzuki}, title = {Development of a high-precision XYZ translator and estimation of beam profile of the vacuum ultraviolet and soft X-ray undulator beamline BL-13B at the Photon Factory}, journal = {Journal of Synchrotron Radiation}, year = 2020, }