@article{CTT100883072,
  author = {Hei Wong and Jieqiong Zhang and HIROSHI IWAI and Kuniyuki KAKUSHIMA},
  title = {Characteristic Variabilities of Subnanometer EOT La2O3 Gate Dielectric Film of Nano CMOS Devices},
  journal = {Nanomaterials},
  year = 2021,
}