@inproceedings{CTT100867523,
  author = {Tsuyoshi Horikawa and Tohru Mogami},
  title = {Ultra-fine Si photonics fabrication technology based on 40-nm-node CMOS process},
  booktitle = {2015 IEEE 12th International Conference on Group IV Photonics (GFP)},
  year = 2015,
}