@inproceedings{CTT100926937, author = {Tsuyoshi Horikawa and Atsushi Kitamura and Masanori Yatan and Nobuhiko Nishiyama}, title = {Formulation for multiple reflection in silicon waveguide observed in OFDR depth profile}, booktitle = {Proc. IEEE Photonics Conference}, year = 2024, } @inproceedings{CTT100911492, author = {Tsuyoshi Horikawa and Atsushi Kitamura and Masanori Yatani and Nobuhiko Nishiyama}, title = {Extraction of Reflection Coefficient in Silicon Waveguides using Multiple Reflection Signals in OFDR}, booktitle = {Proceedings of Conference on Lasers and Electro-Optics (CLEO 2024)}, year = 2024, } @inproceedings{CTT100911341, author = {Tsuyoshi Horikawa and Atsushi Kitamura and Masanori Yatani and Nobuhiko Nishiyama}, title = {Precise waveguide loss extraction using 300-mm wafer-level OFDR for optical process control monitoring}, booktitle = {Proceedings of IEEE SiPhotonics 2024}, year = 2024, } @inproceedings{CTT100902898, author = {堀川 剛 and 北村 敦 and 八谷 将典 and 西山 伸彦}, title = {OFDR法を用いたウェーハレベル光集積デバイス特性検査 ‐細線導波路伝搬損失の高精度評価}, booktitle = {第84回応用物理学会秋季学術講演会}, year = 2023, }