@article{CTT100918393,
  author = {Tomoya Tsutsumi and Kazuki Goshima and Yoshiharu Kirihara and Tatsuki Okazaki and Akira Yasui and Mitani Yuichiro and Kuniyuki KAKUSHIMA and Hiroshi Nohira},
  title = {Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES},
  journal = {},
  year = 2024,
}