@article{CTT100587000, author = {Cheol-hyun.Lim and Jeong-Woo Lee and Jun-ichi. Hanna}, title = {Deposition of Device grade poly-Si films on glasssubstrate directly at 450oC and fabrication of bottom-gate poly-Si TFTs}, journal = {}, year = 2009, } @article{CTT100586999, author = {Cheol-hyun Lim and Jeong-Woo Lee and Jun-ichi Hanna}, title = {CVD-Produced Polycrystalline Silicon Thin Film Prepared by Fluorine-Mediated Crystal Growth on a Glass Substrate and its Thin Film Transistor Application}, journal = {Chem. Vapor. Depo.}, year = 2008, } @article{CTT100556829, author = {N. Sasaki and . Lim, J and . Hanna}, title = {Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD}, journal = {J. Non-Cryst. Solids}, year = 2008, } @article{CTT100587001, author = {Cheol-hyun Lim and Jun-ichi Hanna}, title = {Improvement ofin electrical characteristics of Plasma enhanced Chemical Vapor Deposition–teraethoxylsilane–SiO2 by atomic hydrogen passivation via hot-wire technique}, journal = {Jpn. J. Appl. Phys.}, year = 2006, } @inproceedings{CTT100608060, author = {Cheol-hyun Lim and 半那純一}, title = {GeF4-Si2H6系を用いる熱CVDを用いたGe単結晶膜の形成}, booktitle = {第70回応用物理学会学術講演会講演予稿集}, year = 2010, } @inproceedings{CTT100608066, author = {Jun-ichi Hanna and Cheol-hyun Lim}, title = {Deposition of Poly-SiGe Thin Films by Reactive Thermal CVD and Their TFT Applications}, booktitle = {Proceedings of MRS Spring Meeting 2010}, year = 2010, } @inproceedings{CTT100608059, author = {Jun-ichi Hanna and Cheol hyun Lim}, title = {Low-temperature Growt of epi-Ge thin films by reactive Thermal CVD}, booktitle = {Proceedings of 2nd Int. Symposium on Innovative Solar Cells}, year = 2009, } @inproceedings{CTT100608061, author = {Cheol-hyun Lim and Tatsuya Hoshino and Jun-ichi Hanna}, title = {Direct deposition technique for poly-SiGe thin film achieving a mobility exceeding 20 cm2/Vs with ~30 nm thick bottom-gate TFTs}, booktitle = {IMID 2009 Digest}, year = 2009, } @inproceedings{CTT100584860, author = {Cheol hyun Lim and Jun-ichi Hanna}, title = {Fabrication and characterization of new low-temperature siliconoxide thin film using Tetra-iso-propoxysilane}, booktitle = {第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100584857, author = {Jeong-Woo Lee and Cheol hyun Lim and Jun-ichi Hanna}, title = {Deposition of device grade poly-Si films on glass substrate directly at 450 °C and fabrication of bottom-gate poly-Si TFTs}, booktitle = {Journal of Non-Crystalline Solids}, year = 2008, } @inproceedings{CTT100556828, author = {N. Sasaki and C. Lim and J. Hanna}, title = {Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD}, booktitle = {}, year = 2007, }