@article{CTT100911911, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra}, journal = {Journal of Physics D: Applied Physics}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {J. Vac. Sci. Technol. A}, year = 2024, } @article{CTT100901528, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation}, journal = {Review of Scientific Instruments}, year = 2023, } @article{CTT100869786, author = {Yuya Yamashita and Takuya Akiba and Toshihide Iwanaga and Shuichi Date and Hidehiko Yamaoka and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model}, journal = {IEEE Transactions on Plasma Science}, year = 2022, } @article{CTT100843945, author = {Yuya Yamashita and Takuya Akiba and Toshihide Iwanaga and Hidehiko Yamaoka and Shuichi Date and Hiroshi Akatsuka}, title = {Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model}, journal = {Japanese Journal of Applied Physics}, year = 2021, } @article{CTT100785453, author = {Yuya Yamashita and Fuminori Yamazaki and Atsushi Nezu and Hiroshi Akatsuka}, title = {Diagnostics of low-pressure discharge argon plasma by multi-optical emission line analysis based on the collisional-radiative model}, journal = {JPN. J. APPL. PHYS.}, year = 2019, } @inproceedings{CTT100927132, author = {H. Akatsuka and S. Watanabe and K. Doi and T. Kiyota and Y. Yamashita and W. Kikuchi and K. Ishi and Y. Ye and A. Nezu}, title = {Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP}, booktitle = {Proc. DPS2024}, year = 2024, } @inproceedings{CTT100927261, author = {J. Enomoto and W. Kikuchi and T. Taguchi and Y. Yamashita and A. Nezu and H. Akatsuka}, title = {Optical Emission Spectroscopy Measurement of Atmospheric Pressure Plasma Jet Considering Ionic Continuum Spectrum}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, } @inproceedings{CTT100925568, author = {山下 雄也 and 土居 謙太 and 清田哲司 and 叶宇晨 and 島谷和希 and 何文涛 and 羽生陽向 and 菊地航行 and 櫻井彩貴 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断}, booktitle = {第85回応用物理学会秋季学術講演会 講演要旨集}, year = 2024, } @inproceedings{CTT100925117, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Continuum and Line Spectra with Weighted Analysis}, booktitle = {Proc. ICDDPS-5}, year = 2024, } @inproceedings{CTT100919093, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Proceedings of ESCAMPIG2024}, year = 2024, } @inproceedings{CTT100919092, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Line Spectra with Undetected Level Densities}, booktitle = {Proceedings of 50th EPS Conference on Plasma Physics}, year = 2024, } @inproceedings{CTT100910225, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 渡邊 修平 and 島谷 和希 and 菊地 航行 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100909733, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma}, booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13}, year = 2024, } @inproceedings{CTT100910224, author = {菊地 航行 and 山下 雄也 and 根津 篤 and 赤塚 洋}, title = {大気圧非平衡 Ar プラズマの連続・線スペクトルに基づいた重み付き解析}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100908454, author = {渡邊修平 and 土居謙太 and 清田哲司 and 山下雄也 and 菊地航行 and 石健太 and 根津篤 and 赤塚洋}, title = {誘導結合酸素プラズマの発光分光計測}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908453, author = {石健太 and 土居謙太 and 清田哲司 and 山下雄也 and 米田和真 and 渡邊修平 and 島谷和希 and 根津篤 and 赤塚洋}, title = {誘導結合窒素プラズマ中の励起状態数密度と電子温度の関係性に関する議論}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908457, author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋}, title = {改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100927260, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, } @inproceedings{CTT100907444, author = {菊地航行 and 榎本 純 and 山下 航平 and 山下 雄也 and 根津 篤 and 赤塚洋}, title = {大気圧非平衡Arプラズマの連続・線スペクトルの両者による発光分光計測}, booktitle = {2023年「原子分子データ応用フォーラムセミナー」要旨集}, year = 2023, } @inproceedings{CTT100907445, author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルによるプラズマ診断において視線配置が診断結果に及ぼす影響}, booktitle = {原子分子データ応用フォーラム要旨集}, year = 2023, } @inproceedings{CTT100905976, author = {K. Ishi and K. Yoneda and Y. Yamashita and A. Nezu and H. Akatsuka}, title = {Discussion on Number Densities of Excited States and Gas Temperature in Inductively Coupled Nitrogen Plasma}, booktitle = {E-Abstract book of The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)}, year = 2023, } @inproceedings{CTT100903416, author = {菊地 航行 and 榎本 純 and 山下 航平 and 山下 雄也 and 根津 篤 and 赤塚 洋}, title = {大気圧非平衡Arプラズマの制動輻射と衝突輻射モデルに基づいた解析}, booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100903448, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 菊地 航行 and 石 健太 and 渡邊 修平 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるプラズマ診断におけるチャンバ内壁反射光が電子温度・電子密度診断に及ぼす影響}, booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100896396, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement}, booktitle = {Program-book-abstracts of ICPIG XXXV}, year = 2023, } @inproceedings{CTT100891420, author = {Wataru Kikuchi and Jun Enomoto and Kohei Yamashita and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Estimation of atmospheric-pressure non-equilibrium Ar plasma EEDF using optical emission spectroscopy and linear combination of generalized EEDF}, booktitle = {Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)}, year = 2023, } @inproceedings{CTT100887185, author = {米田 和真 and 山下 雄也 and 土居 謙太 and 清田 哲司 and 浅川 慶一郎 and 石 健太 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測による窒素誘導結合プラズマの振動温度・回転温度の空間分布診断}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100887165, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 浅川 慶一郎 and 細谷 宗太郎 and 菊地 航行 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100887151, author = {小林 明 and 山下 雄也 and 砂川 晃伯 and 米田 和真 and 清田 哲司 and 土居 謙太 and 根津 篤 and 赤塚 洋}, title = {発光分光診断による CF B−X 遷移の振動温度の推定}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100896398, author = {K. Yoneda and Y. Yamashita and K. Doi and T. Kiyota and K. Asakawa and K. Ishi and A. Nezu and H. Akatsuka}, title = {Spatial distribution of vibrational and rotational temperatures of N2 ICP by tomographic optical emission spectroscopic measurement}, booktitle = {Program-book-abstracts of ICPIG XXXV}, year = 2023, } @inproceedings{CTT100883993, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Sotaro Hosoya and Atsushi Nezu and Hiroshi Akatsuka}, title = {Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall}, booktitle = {Proc. 43rd International Symposium on Dry Process (DPS2022)}, year = 2022, } @inproceedings{CTT100882444, author = {Yuya YAMASHITA and Kenta DOI and Tetsuji KIYOTA and Akira KOBAYASHI and Sotaro HOSOYA and Kazuma YONEDA and Atsushi NEZU and Hiroshi AKATSUKA}, title = {Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model}, booktitle = {Proc. ICRP-11/GEC2022}, year = 2022, } @inproceedings{CTT100867332, author = {山下 雄也 and 伊達 修一 and 山岡 英彦 and 秋葉 拓也 and 澁谷 孝幸 and 岩永 敏秀 and 赤塚洋}, title = {アルゴン-酸素低気圧誘導結合プラズマのOHラジカルの振動温度・回転温度の診断}, booktitle = {第69回応用物理学会春季学術講演会 講演予稿集}, year = 2022, } @inproceedings{CTT100863416, author = {Yuya Yamashita and Takuya Akiba and Toshihide Iwanaga and Shuichi Date and Hidehiko Yamaoka and Hiroshi Akatsuka}, title = {The plasma diagnosis of 133 Pa argon microwave discharge plasma by optical emission spectroscopic measurement based on systematic excitation-kinetics analysis}, booktitle = {Proceedings of 42nd International Symposium on Dry Process}, year = 2021, } @inproceedings{CTT100861585, author = {山下 雄也 and 秋葉 拓也 and 岩永 敏秀 and 伊達 修一 and 山岡 英彦 and 赤塚 洋}, title = {エッチング装置で生成したアルゴン低気圧誘導結合プラズマの発光分光計測による電子温度・電子密度・電子エネルギー分布関数診断}, booktitle = {第82回応用物理学会秋季学術講演会 講演予稿集}, year = 2021, } @inproceedings{CTT100845423, author = {山下 雄也 and 秋葉 拓也 and 岩永 敏秀 and 山岡 英彦 and 伊達 修一 and 赤塚 洋}, title = {表面クリーニング用大気圧アルゴンプラズマジェットの発光分光計測による電子温度・電子密度診断}, booktitle = {第68回応用物理学会春季学術講演会 講演予稿集}, year = 2021, } @inproceedings{CTT100831252, author = {山下 雄也 and 秋葉 拓也 and 岩永 敏秀 and 山岡 英彦 and 伊達 修一 and 赤塚 洋}, title = {衝突輻射モデルおよび多数発光線解析に基づく診断モデル最適化アルゴリズムの開発と課題}, booktitle = {第81回応用物理学会秋季学術講演会 講演予稿集}, year = 2020, } @inproceedings{CTT100813506, author = {山下雄也 and 赤塚洋}, title = {Global-modelおよび衝突輻射モデルにもとづくアルゴンプラズマの励起状態数密度分布の電子密度、電子温度および電子エネルギー分布関数依存性}, booktitle = {「プラズマ分光計測と原子分子素過程研究の融合最前線」 「原子分子データ応用フォーラムセミナー」 合同研究会要旨集}, year = 2019, } @inproceedings{CTT100806304, author = {山下雄也 and 赤塚 洋}, title = {発光分光計測による電子エネルギー分布関数診断にむけた低気圧マイクロ波放電アルゴンプラズマの励起状態分布の解析}, booktitle = {第80回応用物理学会秋季学術講演会 講演予稿集}, year = 2019, } @inproceedings{CTT100760107, author = {山下雄也 and 山崎文徳 and 根津篤 and 赤塚洋}, title = {衝突輻射モデルに基づく多数発光線解析によるマイクロ波放電低気圧アルゴンプラズマ診断}, booktitle = {第65回応用物理学会春季学術講演会講演予稿集}, year = 2018, } @inproceedings{CTT100756347, author = {Yuya Yamashita and Hiroshi Akatsuka}, title = {Excitation-kinetic model for argon processing plasma diagnostics by optical emission spectroscopic measurement based on collisional-radiative model}, booktitle = {Proceedings of International Syhmposium on Dry Process}, year = 2017, } @inproceedings{CTT100751672, author = {山下雄也 and 赤塚洋}, title = {衝突輻射モデルに基づく発光分光計測によるアルゴンプロセスプラズマの診断のための原子過程モデル}, booktitle = {第78回応用物理学会秋季学術講演会講演予稿集}, year = 2017, } @inproceedings{CTT100709591, author = {山下雄也 and 清水大雅 and 鮫島俊之}, title = {電子ビーム蒸着と高圧水蒸気熱処理によるアモルファスシリコン薄膜の消光係数の低減}, booktitle = {}, year = 2016, } @inproceedings{CTT100709595, author = {冨田昌吾 and 山下雄也 and 辻琢人}, title = {固相拡散源で形成した拡散層を有する太陽電池の作製と評価}, booktitle = {平成25年度電子情報通信学会東海支部卒業研究発表会論文集}, year = , } @misc{CTT100760896, author = {山下雄也}, title = {衝突輻射モデルに基づく多数発光線解析による低気圧アルゴンプラズマ診断}, year = 2018, } @misc{CTT100713405, author = {山下雄也}, title = {電子ビーム蒸着と高圧水蒸気熱処理による低損失アモルファスシリコン光導波路作製プロセス}, year = 2016, } @mastersthesis{CTT100760896, author = {山下雄也}, title = {衝突輻射モデルに基づく多数発光線解析による低気圧アルゴンプラズマ診断}, school = {東京工業大学}, year = 2018, } @misc{CTT100713405, author = {山下雄也}, title = {電子ビーム蒸着と高圧水蒸気熱処理による低損失アモルファスシリコン光導波路作製プロセス}, school = {東京農工大学}, year = 2016, note = {undergraduate thesis}, }