@article{CTT100668115,
  author = {Tetsuya Shimizu and Yuma Ishimoto and Tso-Fu Mark Chang and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato and Masato Sone},
  title = {Cu Wiring into Nano-Scale Holes by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte with a Continuous Flow Reaction System},
  journal = {The Journal of Supercritical Fluids},
  year = 2014,
}

@inproceedings{CTT100658586,
  author = {Masato Sone and Tetsuya Shimizu and Tso-Fu Mark Chang and Yuma Ishimoto and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato},
  title = {Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture)},
  booktitle = {ECS},
  year = 2013,
}

@inproceedings{CTT100658139,
  author = {Yuma Ishimoto and Tetsuya Shimizu and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Cu Wiring by Electrodeposition in supercritical CO2 Emulsified Electrolyte using Continuous flow reaction system},
  booktitle = {TACT2013},
  year = 2013,
}

@inproceedings{CTT100640071,
  author = {Tetsuya Shimizu and Yuma Ishimoto and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Continuous flow reaction system for nanoscale wiring by Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles},
  booktitle = {38th International Conference on Micro and Nano Engineering, (MNE2012)},
  year = 2012,
}