@article{CTT100780580, author = {Hirokazu Chiba and Rikyu Ikariyama and Shintaro Yasui and HIROSHI FUNAKUBO}, title = {Growth of Epitaxial Bismuth Ruthenate Pyrochlore Films on Yttria-stabilized Zirconia (YSZ) and YSZ-buffered Si Substrates by Metal-organic Chemical Vapor Deposition}, journal = {Thin Solid Films}, year = 2018, } @article{CTT100769658, author = {Hirokazu Chiba and Masaki Hirano and Kazuhisa Kawano and Noriaki Oshima and Hiroshi Funakubo}, title = {Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition}, journal = {Materials Science in Semiconductor Processing}, year = 2017, } @article{CTT100744140, author = {Hirokazu CHIBA and Masaki HIRANO and Kazuhisa KAWANO and Noriaki OSHIMA and Hiroshi FUNAKUBO}, title = {Effects of substrate surface composition and deposition temperature on deposition of flat and continuous Ru thin films}, journal = {Journal of the Ceramic Society of Japan}, year = 2016, } @article{CTT100743989, author = {Hirokazu CHIBA and Ken-ichi TADA and Taishi FURUKAWA and Toshiki YAMAMOTO and Tadahiro YOTSUYA and Noriaki OSHIMA and Hiroshi FUNAKUBO}, title = {Low Temperature MOCVD of Ta2O5 with good dielectric property from Ta(NtBu)(OtBu)3 and O2}, journal = {J. Ceram. Soc. Jpn.}, year = 2016, } @inproceedings{CTT100744803, author = {Hirokazu Chiba and Masaki Hirano and Kazuhisa Kawano and Noriaki Oshima and Hiroshi Funakubo}, title = {Impact of Incubation Time on Deposition of Flat Ru Thin Film on Various Kinds of Substrates at Different Temperature}, booktitle = {}, year = 2016, } @inproceedings{CTT100721739, author = {Hirokazu Chiba and Ken-ichi Tada and Taishi Furukawa and Toshiki Yamamoto and Tadahiro Yotsuya and Noriaki Oshima and Hiroshi Funakubo}, title = {Low Temperature MOCVD deposited Ta2O5 films with good dielectric property from Ta(NtBu)(OtBu)3 and O2}, booktitle = {}, year = 2015, } @misc{CTT100807297, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, year = 2018, } @misc{CTT100807236, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, year = 2018, } @misc{CTT100807244, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, year = 2018, } @misc{CTT100807283, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, year = 2018, } @phdthesis{CTT100807297, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, school = {東京工業大学}, year = 2018, } @phdthesis{CTT100807236, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, school = {東京工業大学}, year = 2018, } @phdthesis{CTT100807244, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, school = {東京工業大学}, year = 2018, } @phdthesis{CTT100807283, author = {Hirokazu Chiba}, title = {Deposition enhancement of thin films by combination design of precursor structure and coreactant gas in metal organic chemical vapor deposition process}, school = {東京工業大学}, year = 2018, }