@article{CTT100675841, author = {Ke Tao and Yoshinori Kurosawa and Jun-ichi Hanna}, title = {Low-temperature epitaxial growth of high quality Si1-xGex (x ≥ 0.99) films on Si(001) wafer by reactive thermal chemical vapor deposition}, journal = {Appl. Phys. Lett.}, year = 2013, }