@article{CTT100800921, author = {Y. Miyamoto and T. Kanazawa and N. Kise and H. Kinoshita and K. Ohsawa}, title = {Regrown Source/Drain in InGaAs Multi-Gate MOSFETs}, journal = {J. Crystal Growth}, year = 2019, } @article{CTT100800893, author = {R. Aonuma and N. Kise and Y. Miyamoto}, title = {GaAsSb/InGaAs double-gate vertical tunnel FET with a subthreshold slope of 56 mV/dec at room temperature}, journal = {Jpn. J. Appl. Phys.}, year = 2019, } @article{CTT100738837, author = {K. Ohsawa and S. Netsu and N. Kise and S. Noguchi and Y. Miyamoto}, title = {Dependence of electron mobility on gate voltage sweeping width and deposition temperature in MOSFETs with HfO2/Al2O3/InGaAs gate stacks}, journal = {Jpn. J. Appl. Phys.}, year = 2017, } @article{CTT100735791, author = {Nobukazu Kise and Haruki Kinoshita and Atsushi Yukimachi and Toru Kanazawa and Yasuyuki Miyamoto}, title = {Fin width dependence on gate controllability of InGaAs channel FinFETs with regrown source/drain}, journal = {Solid-State Electronics}, year = 2016, } @inproceedings{CTT100800934, author = {Y. Miyamoto and N. Kise and R. Aonuma}, title = {GaAsSb/InGaAs double gate tunnel FET operating below 60 mv/decade and temperature dependence of band-edge decay parameters}, booktitle = {}, year = 2018, } @inproceedings{CTT100800851, author = {青沼 遼介 and 木瀬 信和 and 宮本 恭幸}, title = {Al2O3/ZrO2ゲート絶縁膜を使用したことによるGaAsSb/InGaAsダブルゲートトンネルFETの性能改善}, booktitle = {}, year = 2018, } @inproceedings{CTT100800928, author = {R. Aonuma and N. Kise and Y. Miyamoto}, title = {Improvement in GaAsSb/InGaAs double-gate tunnel FET using thermal evaporation for gate electrode and Al2O3/ZrO2 for gate insulator}, booktitle = {}, year = 2018, } @inproceedings{CTT100800923, author = {Y.Miyamoto and T. Kanazawa and N. Kise and H. Kinoshita and Kazuto Ohsawa}, title = {Regrown Source / Drain in InGaAs Multi-Gate MOSFET}, booktitle = {}, year = 2018, } @inproceedings{CTT100768825, author = {Toru Kanazawa and Kazuto Ohsawa and Tomohiro Amemiya and Nobukazu Kise and Ryosuke Aonuma and Yasuyuki Miyamoto}, title = {Fabrication of InGaAs Nanosheet Transistors with Regrown Source}, booktitle = {}, year = 2018, } @inproceedings{CTT100800884, author = {木瀬 信和 and 青沼 遼介 and 宮本 恭幸}, title = {GaAsSb/InGaAsダブルゲートトンネルFETにおけるゲート金属形成プロセスの影響}, booktitle = {}, year = 2018, } @inproceedings{CTT100759540, author = {金澤 徹 and 大澤 一斗 and 雨宮 智宏 and 木瀬 信和 and 青沼 遼介 and 宮本 恭幸}, title = {InGaAsナノシートトランジスタの作製}, booktitle = {}, year = 2018, } @inproceedings{CTT100747615, author = {⼤澤 ⼀⽃ and ⾦澤 徹 and ⽊瀬 信和 and ⾬宮 智宏 and 宮本 恭幸}, title = {InGaAsナノシートチャネルを持つマルチゲートMOSFETに向けた作製プロセス開発}, booktitle = {}, year = 2017, } @inproceedings{CTT100752196, author = {木瀬 信和 and 岩田 真次郎 and 青沼 遼介 and 宮本 恭幸}, title = {[8a-S22-1] 68mV/decのSSをもつGaAsSb/InGaAsダブルゲートトンネルFET}, booktitle = {}, year = 2017, } @inproceedings{CTT100752746, author = {N. Kise and S. Iwata and R. Aonuma and K. Ohsawa and Y. Miyamoto}, title = {GaAsSb/InGaAs Double-Gate Vertical Tunnel FET with a Subthreshold Swing of 68mV/dec at Room Temperature}, booktitle = {}, year = 2017, } @inproceedings{CTT100740854, author = {大澤 一斗 and 野口 真司 and 祢津 誠晃 and 木瀬 信和 and 宮本 恭幸}, title = {[16p-413-11] HfO2/Al2O3/InGaAsゲート構造をもつMOSFETの移動度のH2アニール後における成膜温度およびAl2O3膜厚依存性}, booktitle = {}, year = 2017, } @inproceedings{CTT100740070, author = {岩田 真次郎 and 木瀬 信和 and 青沼 遼介 and 宮本 恭幸}, title = {[16p-412-5] GaAsSb/InGaAsヘテロ接合を用いたダブルゲートトンネルFETにおける不純物濃度調整によるオン電流の向上}, booktitle = {}, year = 2017, } @inproceedings{CTT100738888, author = {青沼遼介 and 岩田真次郎 and 木瀬信和 and 宮本恭幸}, title = {68mV/decのSSを持つGaAsSb/InGaAs縦型ダブルゲートトンネルFET}, booktitle = {}, year = 2017, } @inproceedings{CTT100740944, author = {大澤一斗 and 野口真司 and 祢津誠晃 and 木瀬信和 and 宮本恭幸}, title = {HfO2/Al2O3/InGaAsゲート構造における移動度への成膜温度およびH2アニールの影響}, booktitle = {信学技報}, year = 2017, } @inproceedings{CTT100740976, author = {K. Ohsawa and N. Kise and Y. Miyamoto}, title = {Deposition Temperature and Al2O3 Thickness Dependence on the Mobility of HfO2/Al2O3/InGaAs Gate Stacks}, booktitle = {}, year = 2016, } @inproceedings{CTT100740907, author = {大澤 一斗 and 木瀬 信和 and 宮本 恭幸}, title = {15p-B9-10 HfO2/Al2O3/InGaAsゲート構造における移動度の成膜温度およびAl2O3膜厚依存性}, booktitle = {}, year = 2016, } @inproceedings{CTT100725185, author = {Haruki Kinoshita and Nobukazu Kise and Atsushi Yukimachi and Toru Kanazawa and Yasuyuki Miyamoto}, title = {Operation of 16-nm InGaAs channel multi-gate MOSFETs with regrown source/drain}, booktitle = {}, year = 2016, } @inproceedings{CTT100725184, author = {木下 治紀 and 木瀬 信和 and 祢津 誠晃 and 金澤 徹 and 宮本 恭幸}, title = {再成長S/Dを有するInGaAsマルチゲートMOSFETのLch=16nm動作}, booktitle = {}, year = 2016, } @inproceedings{CTT100740895, author = {木下 治紀 and 木瀬 信和 and 祢津 誠晃 and 金澤 徹 and 宮本 恭幸}, title = {[22p-W541-5] 再成長S/Dを有するInGaAsマルチゲートMOSFETのLch=16nm動作}, booktitle = {}, year = 2016, }