@article{CTT100830501, author = {"K. Tuokedaerhan" and "K. Kakushima" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "H. Iwai"}, title = {Atomically flat La-silicate/Si interface using tungsten carbide gate electrode with nano-sized grain}, journal = {Applied Physics Letters (APL)}, year = 2014, } @article{CTT100830612, author = {"K. Tuokedaerhan" and "R. Tan and K. Kakushima" and "P. Ahmet" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "T. Hattori" and "H. Iwai"}, title = {Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application}, journal = {Applied Physics Letters (APL)}, year = 2013, } @inproceedings{CTT100830488, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki Kakushima and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kazuo Tsutsui and Kenji Natori and Hiroshi Iwai}, title = {Reliability of La-Silicate Mos Capacitors With Tungsten Carbide Gate Electrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100830503, author = {T. Kamale and R. Tan and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and H. Iwai}, title = {Interface Properties La-Silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT}, booktitle = {}, year = 2012, } @inproceedings{CTT100657642, author = {Tohtarhan Kamal and R. Tan and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface Properties of La-silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT}, booktitle = {ECS Transactions}, year = 2012, } @misc{CTT100667410, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, year = 2014, } @misc{CTT100667415, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, year = 2014, } @misc{CTT100690087, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, year = 2014, } @phdthesis{CTT100667410, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, school = {東京工業大学}, year = 2014, } @phdthesis{CTT100667415, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, school = {東京工業大学}, year = 2014, } @phdthesis{CTT100690087, author = {KAMALE TUOKEDAERHAN}, title = {A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics}, school = {東京工業大学}, year = 2014, }