@article{CTT100803130, author = {Taisei Suzuki and Takao Shimizu and Takanori Mimura and Hiroshi Uchida and Hiroshi Funakubo}, title = {Epitaxial ferroelectric Y-doped HfO2 film grown by the RF magnetron sputtering}, journal = {Jpn. J. Appl. Phys.}, year = 2018, } @inproceedings{CTT100771707, author = {鈴木大生 and 三村和仙 and 清水荘雄 and 内田寛 and 舟窪浩}, title = {スパッタリング法による{100}配向Y2O3-HfO2強誘電体エピタキシャル薄膜の作製とその評価}, booktitle = {}, year = 2017, } @inproceedings{CTT100748233, author = {鈴木大生 and 三村和仙 and 清水荘雄 and 内田寛 and 舟窪浩}, title = {スパッタリング法によるY2O3-HfO2強誘電体エピタキシャル薄膜作製とその評価}, booktitle = {}, year = 2017, } @inproceedings{CTT100748227, author = {鈴木大生 and 三村和仙 and 清水荘雄 and 内田寛 and 舟窪浩}, title = {Y2O3-HfO2エピタキシャル薄膜の構成相の決定因子}, booktitle = {}, year = 2017, }