@inproceedings{CTT100633462, author = {Mori, S. and Ogawa, H. and Kitagawa, K. and Irie, K. and Sugiyama, M. and Ogawa, H. and Kitagawa, K. and Irie, K.}, title = {Automatic parameter optimization of the local model fitting method for single-shot surface profiling.}, booktitle = {Applied Optics}, year = 2011, }