@inproceedings{CTT100863419,
  author = {Yuta Kuzuki and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Effect of electron energy distribution function on spectroscopic measurement of excited-state densities of non-equilibrium argon plasma},
  booktitle = {Proceedings of 42nd International Symposium on Dry Process},
  year = 2021,
}