論文

• Ke Tao, Jun-ichi Hanna. Epitaxial growth of germanium-rich silicon-germanium films on Si(0 0 1) substrate by reactive thermal chemical vapor deposition, Appl. Surf. Sci., Vol. 282, pp. 472-477, June 2013.
• Ke Tao, Yoshinori Kurosawa, Jun-ichi Hanna. Low-temperature epitaxial growth of high quality Si1-xGex (x ≥ 0.99) films on Si(001) wafer by reactive thermal chemical vapor deposition, Appl. Phys. Lett., Vol. 102, No. 18, pp. 182109 - 182109-5, May 2013.

国際会議発表 (査読なし・不明)

• Ke Tao, Jun-ichi Hanna. Low-temperature epitaxial growth of Ge-rich SiGe film on Si by Reactive Thermal Chemical Vapor Deposition, 2013MRS Fall Meeting, T9.18, Dec. 2013.

[ BibTeX 形式で保存 ]    [ 論文・著書をCSV形式で保存 ]    [ 特許をCSV形式で保存 ]