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LEIYIMING 研究業績一覧 (7件)
- 2024
- 2023
- 2022
- 2021
- 2020
- 全件表示
論文
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Yiming Lei,
Hitoshi Wakabayashi,
Kazuo Tsutsui,
Hiroshi Iwai,
Masayuki Furuhashi,
Shingo Tomohisa,
Satoshi Yamakawa,
Kuniyuki Kakushima.
Effect of Lanthanum Silicate Interface Layer on the Electrical Characteristics of 4H-SiC Metal-Oxide-Semiconductor Capacitors,
Microelectronics Reliability,
vol. 84,
pp. 248-252,
May 2018.
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Yiming Lei,
Hitoshi Wakabayashi,
Kazuo Tsutsui,
Hiroshi Iwai,
Masayuki Furuhashi,
Shingo Tomohisa,
Satoshi Yamakaw,
Kuniyuki Kakushima.
Improvement of SiO2/4H-SiC Interface properties by post-metallization annealing,
Microelectronics Reliability,
vol. 84,
pp. 226-229,
May 2018.
国際会議発表 (査読有り)
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Y. M. Lei,
T. Kaneko,
H. Wakabayashi,
K. Tsutsui,
H. Iwai,
K. Kakushima,
M. Furuhashi,
S. Tomohisa,
S. Yamakawa.
Influence of Interface ALD-SiO2 Layer for Lanthanum Silicate Gate Dielectrics for 4H-SiC MOS Capacitors,
47th IEEE Semiconductor Interface Specialists Conference (SISC2016),
Dec. 2016.
特許など
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角嶋邦之,
川那子高暢,
宗清修,
LEIYIMING,
古橋 壮之,
三浦 成久.
半導体装置及びその製造方法.
特許.
登録.
国立大学法人東京工業大学, 三菱電機株式会社.
2014/08/28.
特願2014-173714.
2016/04/07.
特開2016-048758.
特許第6270667号.
2018/01/12
2018.
学位論文
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A Study on Atomic Layer Deposited SiO2 for SiC Gate Dielectrics,
Exam Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2018/06/30,
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A Study on Atomic Layer Deposited SiO2 for SiC Gate Dielectrics,
Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2018/06/30,
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A Study on Atomic Layer Deposited SiO2 for SiC Gate Dielectrics,
Thesis,
Doctor (Engineering),
Tokyo Institute of Technology,
2018/06/30,
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