論文

• Cheol-hyun.Lim, Jeong-Woo Lee, Jun-ichi. Hanna. Deposition of Device grade poly-Si films on glasssubstrate directly at 450oC and fabrication of bottom-gate poly-Si TFTs, July 2009.
• Cheol-hyun Lim, Jeong-Woo Lee, Jun-ichi Hanna. CVD-Produced Polycrystalline Silicon Thin Film Prepared by Fluorine-Mediated Crystal Growth on a Glass Substrate and its Thin Film Transistor Application, Chem. Vapor. Depo., Vol. 14, No. 5-6, pp. 107-110, July 2008.
• N. Sasaki, . Lim, J, . Hanna. Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD, J. Non-Cryst. Solids, Vol. 354, p. 2079, Feb. 2008.
• Cheol-hyun Lim, Jun-ichi Hanna. Improvement ofin electrical characteristics of Plasma enhanced Chemical Vapor Deposition–teraethoxylsilane–SiO2 by atomic hydrogen passivation via hot-wire technique, Jpn. J. Appl. Phys., Vol. 45, No. 48, pp. L1270-1272, July 2006.

国際会議発表 (査読有り)

• Jun-ichi Hanna, Cheol-hyun Lim. Deposition of Poly-SiGe Thin Films by Reactive Thermal CVD and Their TFT Applications, MRS Spring Meeting 2010, Proceedings of MRS Spring Meeting 2010, Apr. 2010.
• Cheol-hyun Lim, Tatsuya Hoshino, Jun-ichi Hanna. Direct deposition technique for poly-SiGe thin film achieving a mobility exceeding 20 cm2/Vs with ~30 nm thick bottom-gate TFTs, IMID 2009, IMID 2009 Digest, Oct. 2009.
• Jeong-Woo Lee, Cheol hyun Lim, Jun-ichi Hanna. Deposition of device grade poly-Si films on glass substrate directly at 450 °C and fabrication of bottom-gate poly-Si TFTs, Journal of Non-Crystalline Solids, Vol. 354, No. 18-25, pp. 2500-2504, June 2008.
• N. Sasaki, C. Lim, J. Hanna. Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD, 22nd International Conference on Amorphous and Nanocrystalline Semiconducto, Aug. 2007.

国内会議発表 (査読有り)

• Cheol-hyun Lim, 半那純一. GeF4-Si2H6系を用いる熱CVDを用いたGe単結晶膜の形成, 第70回応用物理学会学術講演会, 第70回応用物理学会学術講演会講演予稿集, July 2010.

国際会議発表 (査読なし・不明)

• Jun-ichi Hanna, Cheol hyun Lim. Low-temperature Growt of epi-Ge thin films by reactive Thermal CVD, 2nd Int. Symposium on Innovative Solar Cells, Proceedings of 2nd Int. Symposium on Innovative Solar Cells, Dec. 2009.

国内会議発表 (査読なし・不明)

• Cheol hyun Lim, Jun-ichi Hanna. Fabrication and characterization of new low-temperature siliconoxide thin film using Tetra-iso-propoxysilane, 第69回応用物理学会学術講演会予稿集, Sept. 2008.

[ BibTeX 形式で保存 ]    [ 論文・著書をCSV形式で保存 ]    [ 特許をCSV形式で保存 ]